The copper target was operated at voltages of 11 kV, 12 kV, 13 kV, and 14 kV for the electron source, and a 50 kV configuration using a molybdenum target was used as a representative example for the ...

EDS is prone to insufficient energy resolution to differentiate energy lines near each other. For example, Si K, W M, and Ta M lines have only 30 eV energy differences. When these elements occur in ...