FREMONT, Calif. – Asyst Technologies, Inc., has announced the Axys FastSwap atmospheric wafer transfer robot, which it claims is capable of replacing a processed wafer with a fresh one in less than ...
Proprietary systems have traditionally dominated the control of three and four-axis wafer handling robots for in-vacuum and in-air wafer applications. As a result, these systems can be limited in ...
一些您可能无法访问的结果已被隐去。
显示无法访问的结果