Abstract: Cluster tools are extensively used for processing wafers in semiconductor manufacturing. To enhance the throughput of cluster tools, concurrent processing of multiple types of wafers has ...

Abstract: Burrs, cracks, and scratches are often produced on silicon carbide (SiC) wafers during various processing stages, such as rolling and cutting. To address these challenges, edge grinding ...

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Semiconductor fabrication facilities risk substantial financial exposure from incoming wafers defects. With typical lot sizes of 25 wafers and finished wafer values ranging from $4,000 to $17,000, ...

Mitsui Chemicals, Inc. is advancing the development of Diffrar™ polymer wafers for waveguides used in augmented reality (AR) glasses, with a view to expanding the augmented and virtual reality markets ...