High-brightness and compact LPP EUV source for inspection system
spiedigitallibrary.org
High-brightness and compact LPP EUV source for inspection system
With the full-scale adoption of EUV exposure tools, the use of Metrology and Inspection systems adapted for EUV process evaluation is increasing. In particular, with the increased durability of Pellicle, the importance of actinic Metrology and Inspection systems is increasing, and EUV light sources with high brightness and high availability are ...
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