Advanced Process Technologies - Part 2: Fabricating a FinFET
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Advanced Process Technologies - Part 2: Fabricating a FinFET
This is part 2 of my lecture on Advanced Process Technologies. In this lecture, I introduce advanced process technologies based on FinFET (Tri-gate) structures. In the lecture, I start with the motivation for the move to the "third-dimension" and then overview the primary mechanisms for fabricating a deeply scaled (22nm and below) FinFET device ...
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